SOLAR INSPECTION SYSTEMS
From silicon to solar modules: Intego offers inspection systems for all production steps
CERAMICS & GLASS INSPECTION SYSTEMS
Inclusions, cracks, geometry measurements: quality control in ceramics and glass production is crucial for flawless parts
PLASTICS INSPECTION SYSTEMS
Automotive or medical engineering: Intego has many years of experience in inspection technologies for plastic products
METAL INSPECTION SYSTEMS
Surface inspection or measurement of grooves: Convince yourself of our solutions
SEMICONDUCTOR INSPECTION SYSTEMS
High throughput detection of surface, material and process defects for bare, epitaxial, patterned and diced wafers More...
ELECTRONIC INSPECTION SYSTEMS
Lock-in thermography shows defects and material properties below the visible surface
The combination of complex camera technology and automation allows new solutions in industrial production
Intego is an innovative medium-sized company located in Erlangen, Germany. Together with our team we develop and manufacture complex inspection systems for our customers worldwide.
We are very pleased to announce that our activity for a photoluminescence scanner was awarded the Semikron Innovation Award 2016 at the power electronics conference PCIM in Nuremberg. The official press release can be found here.
In the last decade, the interest in silicon carbide (SiC) high power application devices has grown significantly due to the positive properties of SiC. Despite great improvements in the material quality of 4H-SiC substrates and epiwafers within the last years, critical crystallographic defects such as stacking faults (SFs) and basal plane dislocations (BPDs) can still lead to bipolar degradation and finally the complete failure of the device.
In this context, Intego developed a new photoluminescence scanner in 2016 in collaboration with the Fraunhofer institute IISB and other partners from industry and academia. We concentrate on the inspection of SiC wafers.
The scanner provides short inspection times that are suitable for an industrial application. The previous techniques are either destructive (selective etching) or very cost-intensive (synchrotron X-ray radiation).
The new developed photoluminescence scanner for SiC wafers achieves reliable identification of the most significant crystallographic defects. In the scanning process, a specific UV laser is used as the excitation source (wavelength 325 nm) in combination with a sensitive EMCCD camera.
Our system detects the following defects.
If you require an individual solution, Intego offers free-of-charge feasibility studies based on sample parts. The prepared study will include a system design with draft specifications and a price estimate. Do not hesitate to contact us directly.
A further report about our inspection system was published in the EEtimes.
The scientific paper containing more details about the SiC inspection can be downloaded here.
PCO wrote an application report here.
Dr. Steffen Oppel
+49 9131 61082-230