
Wafers and microlens arrays inspection
100% inspection of optical cleanliness and function
Glass wafers, microlens arrays and wafer-level optics in general are used as precursors for the semiconductor and optical industry or as beam-shaping elements for the automotive and medical sectors, as fiber optics or in optical sensors.
In order to fulfill their intended purpose, the surfaces and volumes of the components must free of defects and foreign bodies. In the case of microlens arrays and wafer-level optics, compliance with shape tolerances is also essential for correct optical function and mechanical integration into assemblies.
Coverage of many inspection tasks
To ensure quality in the production of wafers, microlens arrays and wafer-level optics, various potential defect types must be detected:
- Surface imperfections (e.g. scratches, holes, chipping, soiling)
- Material imperfections (e.g. bubbles, inclusions, inhomogeneities)
- Coating defects, discoloration, clouding
- Surface shape deviations
- Dimensional deviations (e.g. center thickness)
Intego's inspection systems are able to carry out all these tests fully automatically - if desired, also combined in a single machine.
Customized use of various measurement techniques
Different technologies are integrated in Intego's systems to fulfill the testing tasks, including
- High-resolution matrix and line scan cameras
- Optimized light sources
- Confocal, triangulative, interferometric or deflectometric sensors
- High-precision actuators
The optimum measurement technology and components are selected on a customer-specific basis according to the parts to be tested and the test requirements.
Customized software
Data acquisition and parts handling are controlled in the in-house software and the measurement data is evaluated in parallel. The parts under test are classified according to standards (e.g. DIN ISO 10110 or scratch/dig according to MIL/ANSI) or adapted to the customer's specific requirements. In addition to classic image processing, deep learning methods are also used.
Machine status and test results are displayed live to the operator on the system's graphical user interface. All relevant information, including defect maps, quantities, etc., is visible at a glance. The storage of the results data ensures complete traceability of all parts and also allows subsequent analysis of the recorded data.
Automation and interfaces
Intego offers its inspection systems as stand-alone systems with manual loading, e.g. for laboratory use, or as inline systems for integration into automated production lines. Almost any interface can be implemented for communication with external handling systems or sensors as well as connection to customer databases.
Contact us
Feel free to contact us if you are interested or have any questions. You will find contact details at the top right of this page and under Contacts. Intego also offers free preliminary studies on the basis of sample parts. The study provides you with a system concept with a price estimate.