SOLAR INSPECTION SYSTEMS
From silicon to solar modules: Intego offers inspection systems for all production steps
CERAMICS & GLASS INSPECTION SYSTEMS
Inclusions, cracks, geometry measurements: quality control in ceramics and glass production is crucial for flawless parts
PLASTICS INSPECTION SYSTEMS
Automotive or medical engineering: Intego has many years of experience in inspection technologies for plastic products
METAL INSPECTION SYSTEMS
Surface inspection or measurement of grooves: Convince yourself of our solutions
SEMICONDUCTOR INSPECTION SYSTEMS
High throughput detection of surface, material and process defects for bare, epitaxial, patterned and diced wafers More...
ELECTRONIC INSPECTION SYSTEMS
Lock-in thermography shows defects and material properties below the visible surface
The combination of complex camera technology and automation allows new solutions in industrial production
Intego is an innovative medium-sized company located in Erlangen, Germany. Together with our team we develop and manufacture complex inspection systems for our customers worldwide.
Detection of hard inclusions, e.g. SiC, in multicrystalline silicon bricks is vital for ensuring the stability of the subsequent wafering process. Other inclusions, e.g. Si3N4, may reduce the efficiency and mechanical stability of the wafers and cells. In particular, wafering with diamond wires is very sensitive to the smallest (< 0.1 mm) hard particle inclusions and introduces a requirement for high resolution NIR inspection to detect such particles prior to the wire sawing process. Furthermore, impressively detailed images and 3D maps of inclusions will enable you to optimize your crystallization processes.
The ORION NIR inspection system can handle brick sizes up to 210 × 210 × 1000 mm³ and has cycle times from 1 to 5 min per brick depending on the system configuration, the brick length and on the required accuracy.
The standard image resolution for inline use is 100 μm. In addition, we can offer the ORION SHR (Super High Resolution) system with an unsurpassed resolution of 18 μm, making it the ultimate tool for ensuring the quality, stability and efficiency of your further processing steps and your final product.
The pixel resolution of 18 µm, the brilliant focus throughout the entire brick and rich contrast enable detection of the smallest needle-like defects and SiC particles – prerequisites for establishing a stable diamond wire cutting process. Optimize crystallization by seeing exactly what kinds of inclusions are present and where they are located within the whole ingot. Last but not least: Increase yield by reducing false rejections.
The automatic inspection of silicon blocks is suitable for continuous automated production as well as for manual operation as a stand-alone system, e.g. for the laboratory.
Intego ORION systems feature an easy to use, state of the art graphical user interface. Diverse options for the 3D representation of results, the defect density plots, the export of user configurable PDF reports and even the generation of movies of a virtual flight through the brick only take a few mouse clicks.
Results are shown on a user monitor, where system parameters can be changed, inspection results can be supervised and external operating signals can be tapped. The results can also be communicated to an existing automation and/or MES (e. g. by Profibus, ethernet). GEM/SECS, Semi E10, XML are supported and customer specific protocols can be integrated on request.
If you require an individual solution, Intego offers free-of-charge feasibility studies based on sample parts. The prepared study will include a system design with draft specifications and a price estimate. Do not hesitate to contact us directly.
+49 9131 61082-220