ORION – 3D Geometry Measurement


Raise efficiency of your production

The ORION 3D geometry measurement is useful at two production steps:

  • After the squaring process, to generate recommendations for the polishing system to reduce the polishing efforts.
  • During the final check, to ensure the best quality for the geometry measurements and surface properties.

Performance data

The ORION 3D geometry measurement system can handle brick sizes up to 210 × 210 × 1000 mm³ and has cycle times from 1 to 5 min per brick depending on the system configuration, the brick length and on the required accuracy.

To avoid thermal drifts, a reference plate of exactly known dimensions is scanned at each measurement. Long term stability is ensured by a fully automatic calibration procedure based on measurement of a CMM referenced silicon brick.


Key facts

  • Measurement of length, width and height (accuracy better than 10 µm)
  • Ascertainment of angularity, squareness and flatness
  • Fully automatic calibration procedure
  • Detection of defects, grooves and steps
  • Roughness measurement
  • 3D measurement of brick top
  • Precise chamfer measurement
  • Generation of grinding recommendations

Technical options


Lab or production environment

The automatic inspection of silicon blocks is suitable for continuous automated production as well as for manual operation as a stand-alone system, e.g. for the laboratory.

Intego ORION systems feature an easy to use, state of the art graphical user interface. Diverse options for 3D representation of results or export of user configurable PDF reports only take a few mouse clicks.

Results are shown on a user monitor, where system parameters can be changed, inspection results can be supervised and external operating signals can be tapped. The results can also be communicated to an existing automation and/or MES (e. g. by Profibus, ethernet). GEM/SECS, Semi E10, XML are supported and customer specific protocols can be integrated on request.

 

Further options

If you require an individual solution, Intego offers free-of-charge feasibility studies based on sample parts. The prepared study will include a system design with draft specifications and a price estimate. Do not hesitate to contact us directly.