Microscope Scanner (LEDs, OLEDs, MEMS)


Raise efficiency of your production

The microscope scanner for the inspection of LEDs, OLEDs and MEMS is based on an automated platform, which delivers a high throughput of the parts. The basic system consists of a handling unit and a measuring unit. In the handling unit, a robot transports the wafers or substrates, which can exhibit diameters of up to 12", out of the cassettes, while in the measuring unit the samples are moved under the detector. Typically, resolutions of 0.1 μm - 5 μm are achieved in combination with illumination techniques from the UV-VIS-IR spectral range.


Performance data and key facts

The inspection of components is necessary in the production of

  • LEDs
  • OLEDs
  • MEMS
  • Diodes
  • Customized products

Typical inspection objectives are

  • Surface and volume defects (microcracks, scratches, bumps, flaking, particles, inclusions)
  • Evaluation of structures (component arrangement, laser pattern, etching processes, interconnects)

The measuring unit can be equipped with special detectors, lightings and types of excitations such as

  • Fast line scan and matrix cameras with high resolution (up to 0.5 μm / px)
  • Different contrast modes (BF, DF, DIC, Pol)
  • Optical illumination from UV to IR
  • Luminance and color measurement
  • Interferometry
  • Photoluminescence
  • Thermography

Further options

If you require an individual solution, Intego offers free-of-charge feasibility studies based on sample parts. The prepared study will include a system design with draft specifications and a price estimate. Do not hesitate to contact us directly.


Your contact for the microscope scanner


Dr. Steffen Oppel
Dr. Steffen Oppel

+49 9131 61082-230

steffen.oppel@intego.de