SOLAR INSPECTION SYSTEMS
From silicon to solar modules: Intego offers inspection systems for all production steps
SAPPHIRE INSPECTION SYSTEMS
Inclusions, crystal defects, geometry measurement: Quality control in sapphire products is crucial for faultless products
PLASTICS INSPECTION SYSTEMS
Automotive or medical engineering: Intego has many years of experience in inspection technologies for plastic products
METAL INSPECTION SYSTEMS
Surface inspection or measurement of grooves: Convince yourself of our solutions
SEMICONDUCTORS INSPECTION SYSTEMS
Short inspection times and microscope techniques enable a 100% production control More...
ELECTRONIC INSPECTION SYSTEMS
Lock-in thermography shows defects and material properties below the visible surface
The combination of complex camera technology and automation allows new solutions in industrial production
Intego is an innovative medium-sized company located in Erlangen, Germany. Together with our team we develop and manufacture complex inspection systems for our customers worldwide.
In the semiconductor industry, high standards are required to ensure the faultless quality of the final products. The inspection of the basic substrates and semi-finished products is an important step for precisely characterizing component properties and production processes. Thereby, high reproducibility and absolute accuracy of the measurements are taken into account. Our automated vision systems make a significant contribution to optimizing your quality and efficiency. The measurements are carried out continuously and include live statistics.
The microscope scanner for the inspection of LEDs, OLEDs and MEMS is based on an automated platform, which delivers a high throughput of the parts. The basic system consists of a handling unit and a measuring unit. In the handling unit, a robot transports the wafers or substrates, which can have a diameter of up to 12", out from the cassettes, while in the measuring unit the samples are moved under the detector. Typically, resolutions of 0.1 μm - 5 μm are achieved in combination with illumination techniques from the UV-VIS-IR spectral range.
The crystal growth of semiconductor compounds (SiC, GaAs, etc.) and subsequent processing of the wafers to components is of increasing importance in the semiconductor industry. Despite major improvements in the material quality of substrates and epiwafers, critical defects such as stacking faults (SFs) and basal plane dislocations (BPDs) can lead to complete failure of the components. In this context, a novel photoluminescence scanner for SiC wafers was developed with industrial and academia partners.
• Inspection of LEDs, OLEDs, MEMS• High throughput, inline process
MICROSCOPE SCANNER »
• Inspection of SiC wafer• Characterization of crystallographic defects
PHOTOLUMINESCENCE SCANNER »